Design, implementation, manufacturing and measurements of Dickson charge pump circuits for capacitive micromachined sensor biasing

This work presents the design and testing process of Dickson charge pump circuits for micromachined sensor biasing. Necessary blocks of different types of circuits with different functions are examined such as inverters, diode connected MOSFETs, ring oscillators, bond PADs, charge pump stages. Layouts for these circuits are designed and simulated using extracted parameters. The designed circuits are operating using a 5 Volts supply to generate output voltage levels of 12-15 Volts. Finalized layouts are placed on a chip using 0:35 µm process. Designed chip is manufactured and bonded on a test PCB for verification. Measurement results are given and analyzed. Layout and circuit design improvements are proposed and simulated for proof. Steps for future improved designs and precautions are provided. This work enables the way for better functioning charge pump topologies and designs in the future.