A novel equivalent circuit model for CMUTs
Date
2009-09
Authors
Oğuz, H. Kağan
Olcum, Selim
Senlik, Muhammed N.
Atalar, Abdullah
Köymen, Hayrettin
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Abstract
A nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately. ©2009 IEEE.
Source Title
Proceedings - IEEE Ultrasonics Symposium
Publisher
IEEE
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Keywords
Cmut, Harmonic distortion, Nonlinear model, Root mean square velocity, Velocity profile, Capacitive micromachined ultrasonic transducer, Electromechanical conversion, Equivalent circuit model, FEM simulations, Membrane surface, Model parameters, New model, Non-linear model, Nonlinear equivalent circuit, Root Mean Square, Velocity profiles, Wide frequency range, Computer simulation, Finite element method, Mechanical properties, Ultrasonics, Velocity, Velocity distribution, Ultrasonic transducers
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Language
English
Type
Conference Paper