A novel equivalent circuit model for CMUTs
Date
2009-09
Advisor
Instructor
Source Title
Proceedings - IEEE Ultrasonics Symposium
Print ISSN
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
2193 - 2196
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract
A nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately. ©2009 IEEE.
Course
Other identifiers
Book Title
Keywords
Cmut, Harmonic distortion, Nonlinear model, Root mean square velocity, Velocity profile, Capacitive micromachined ultrasonic transducer, Electromechanical conversion, Equivalent circuit model, FEM simulations, Membrane surface, Model parameters, New model, Non-linear model, Nonlinear equivalent circuit, Root Mean Square, Velocity profiles, Wide frequency range, Computer simulation, Finite element method, Mechanical properties, Ultrasonics, Velocity, Velocity distribution, Ultrasonic transducers