Study of wet oxidized AlxGa1-xAs for integrated optics

buir.contributor.authorAydınlı, Atilla
dc.citation.epage438en_US
dc.citation.issueNumber4en_US
dc.citation.spage436en_US
dc.citation.volumeNumber11en_US
dc.contributor.authorBek, A.en_US
dc.contributor.authorAydınlı, Atillaen_US
dc.contributor.authorChamplain, J. G.en_US
dc.contributor.authorNaone, R.en_US
dc.contributor.authorDagli, N.en_US
dc.date.accessioned2016-02-08T10:41:42Z
dc.date.available2016-02-08T10:41:42Z
dc.date.issued1999en_US
dc.departmentDepartment of Physicsen_US
dc.description.abstractAn investigation of wet oxidized AlxGa1-xAs layers in integrated optical applications is reported. Refractive index and thickness shrinkage of wet oxidized AlxGa1-xAs layers are measured using spectroscopic ellipsometry. A Cauchy fit to the refractive index is found in the wavelength range between 0.3 and 1.6 μm. The refractive index at 1.55 μm is found to be 1.66±0.01 with little dispersion around 1.55 μm. Very low loss single-mode waveguides with metal electrodes showing very low polarization dependence of loss coefficient are fabricated using wet oxidized AlxGa1-xAs layers as upper cladding. Optical polarization splitters are also designed and fabricated from the same type of waveguides taking advantage of increased birefringence. Designs utilizing wet oxidized AlxGa1-xAs are compared with conventional designs using only compound semiconductor heterostructures.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T10:41:42Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 1999en
dc.identifier.doi10.1109/68.752540en_US
dc.identifier.issn1041-1135
dc.identifier.urihttp://hdl.handle.net/11693/25254
dc.language.isoEnglishen_US
dc.publisherInstitute of Electrical and Electronics Engineersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/68.752540en_US
dc.source.titleIEEE Photonics Technology Lettersen_US
dc.subjectIntegrated opticsen_US
dc.subjectLight polarizationen_US
dc.subjectOptical waveguidesen_US
dc.subjectOxidationen_US
dc.subjectRefractive indexen_US
dc.subjectSemiconducting aluminum compoundsen_US
dc.subjectPolarization splittersen_US
dc.subjectOptical filmsen_US
dc.titleStudy of wet oxidized AlxGa1-xAs for integrated opticsen_US
dc.typeArticleen_US

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