Interaction between a cMUT cell and a liquid medium around the parallel resonance frequency

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Abstract

In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.

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IEEE Ultrasonics Symposium Proceedings, 2007

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IEEE

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Citation

Published Version (Please cite this version)

Language

English