Interaction between a cMUT cell and a liquid medium around the parallel resonance frequency

Series

Abstract

In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.

Source Title

IEEE Ultrasonics Symposium Proceedings, 2007

Publisher

IEEE

Course

Other identifiers

Book Title

Keywords

Cell membranes, Electroacoustic transducers, Flow interactions, Natural frequencies, Ultrasonic transducers, Ultrasonics, Average velocity, Capacitive micromachined ultrasonic transducer, Immersion medium, Liquid mediums, Parallel resonance, Parametric modeling, Zero energy, Resonance

Degree Discipline

Degree Level

Degree Name

Citation

Published Version (Please cite this version)

Language

English

Type

Conference Paper