Noise analysis of interdigital cantilevers for atomic force microscopy

Abstract

Atomic force microscoiDe (AFM) is proved to be a powerful tool for atomic resolution surface imaging. The most crucial parts of an AFM system are the cantilever with an integrated tip and the deflection detection sensor. AFM systems measure deflections that are comparable to atomic dimensions using technicpies such as tunneling, interferometry, piezoresistive sensing and optical lever detection. Interdigital (ID) cantilevers are the most recently introduced method which makes use of its interferometric nature to improve deflection detection sensitivity. Basicallj^ ID cantilever is composed of two sets of interleaving fingers which create an optical phase grating. In this thesis, a detailed analysis of ID cantilevers will be presented. The theory underlying the o[)eration of the phase gratings with the response curves curd confirming e.xperimental results will be formulated. The noise performance of the ID cantilever will be compared to the optical lever detection method. We will present a new method for the mechaniccd noise calculation by using the analogy between electrical circuits and mechanical structures. This new method will be applied to the AFM cantilevers to calculate the noise correlation on the cantilever surface. We will also present the signal to noise ratio (SNR) calculation method on the cantilever. One of the basic problem of the all AF'M systems is the speed limitation due to single AF'M tip scanning at relatively low frequencies yielding low throughput. A direct approach to this problem is the operation of cantilever arrays instead of one cantilever. In this thesis, we will also present the electronics for cantilever arrays which increases the throughput of the AFM systems.