Designing efficient CMUT cells for airborne applications

Date
2014
Advisor
Instructor
Source Title
Proceedings of the International Ultrasonics Symposium, IEEE 2014
Print ISSN
1948-5719
Electronic ISSN
Publisher
IEEE
Volume
Issue
Pages
2564 - 2567
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract

In this work, we study airborne CMUT cells with vacuum gap where silicon plate is operated both in elastically linear and nonlinear regimes. We report the results of a new mode of operation where the plate center swings the entire gap. The plate is kept in elastically linear region in this mode. Very large pressure levels are obtained at relatively low drive voltage levels. The operation is very efficient but the bandwidth is less than 1%. We considered operating the silicon membrane in elastically nonlinear region for larger bandwidth without sacrificing efficiency. This is achieved by employing the stiffening effect due to the atmospheric pressure. We derived the new model of the CMUT, where the membrane profile deviates from linear profile as a function of the differential static pressure on it. We present the force, the compliance models and the static analysis of stiffened CMUT cells in this work.

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Other identifiers
Book Title
Keywords
Atmospheric pressure, Airborne applications, Low-drive voltages, Mode of operations, Non-linear regimes, Nonlinear regions, Silicon membranes, Bandwidth
Citation
Published Version (Please cite this version)