An optical microcantilever with integrated grating coupler

Date
2009-06
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Source Title
CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference
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Publisher
IEEE
Volume
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Pages
1
Language
English
Type
Conference Paper
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Abstract

In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.

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Keywords
Integrated optics, Gratings, Optical coupling, Optical waveguides, Optical sensors, Holography, Atom optics, Atomic force microscopy, Optical microscopy, Holographic optical components
Citation
Published Version (Please cite this version)