Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage447en_US
dc.citation.issueNumber2en_US
dc.citation.spage438en_US
dc.citation.volumeNumber57en_US
dc.contributor.authorOguz, H. K.en_US
dc.contributor.authorOlcum, S.en_US
dc.contributor.authorSenlik, M. N.en_US
dc.contributor.authorTaş, V.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.date.accessioned2016-02-08T09:58:29Z
dc.date.available2016-02-08T09:58:29Z
dc.date.issued2010en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractFinite element method (FEM) is used for transient dynamic analysis of capacitive micromachined ultrasonic transducers (CMUT) and is particularly useful when the membranes are driven in the nonlinear regime. One major disadvantage of FEM is the excessive time required for simulation. Harmonic balance (HB) analysis, on the other hand, provides an accurate estimate of the steady-state response of nonlinear circuits very quickly. It is common to use Mason's equivalent circuit to model the mechanical section of CMUT. However, it is not appropriate to terminate Mason's mechanical LC section by a rigid piston's radiation impedance, especially for an immersed CMUT. We studied the membrane behavior using a transient FEM analysis and found out that for a wide range of harmonics around the series resonance, the membrane displacement can be modeled as a clamped radiator. We considered the root mean square of the velocity distribution on the membrane surface as the circuit variable rather than the average velocity. With this definition, the kinetic energy of the membrane mass is the same as that in the model. We derived the force and current equations for a clamped radiator and implemented them using a commercial HB simulator. We observed much better agreement between FEM and the proposed equivalent model, compared with the conventional model.en_US
dc.description.provenanceMade available in DSpace on 2016-02-08T09:58:29Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2010en
dc.description.sponsorshipTurkish Scientific and Research Council (TUBITAK)en_US
dc.description.sponsorshipASELSANen_US
dc.identifier.doi10.1109/TUFFC.2010.1424en_US
dc.identifier.issn1525-8955
dc.identifier.urihttp://hdl.handle.net/11693/22316
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://doi.org/10.1109/TUFFC.2010.1424en_US
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Controlen_US
dc.subjectFinite element analysisen_US
dc.subjectInstrumentationen_US
dc.subjectMicrotechnologyen_US
dc.subjectNonlinear systemen_US
dc.subjectTransduceren_US
dc.subjectUltrasounden_US
dc.titleNonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysisen_US
dc.typeArticleen_US

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