Fabrication and characterization of zinc oxide based surface acoustic wave devices

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buir.advisorBıyıklı, Necmi
dc.contributor.authorNoyan, Mehmet Alican
dc.date.accessioned2016-01-08T18:26:12Z
dc.date.available2016-01-08T18:26:12Z
dc.date.issued2013
dc.descriptionAnkara : Materials Science and Nanotechnology Program of the Graduate School of Engineering and Science of Bilkent University, 2013.en_US
dc.descriptionThesis (Master's) -- Bilkent University, 2013.en_US
dc.descriptionIncludes bibliographical references leaves 86-93.en_US
dc.description.abstractSurface acoustic wave (SAW) devices, as applied to today’s technology, were first described in 1965. Since then, these devices were applied to a wide variety of fields. Bandpass filter is their most common application, which is an important component in consumer products such as televisions and mobile phones. SAW devices can also be utilized as chemical and biological sensors. Driving force behind the development of SAW sensors is their small size, high sensitivity, reliability, and durability. This thesis presents the development and characterization of ZnO/Si based SAW devices. ZnO thin films with c-axis orientation were deposited using rfmagnetron sputtering. Effect of post deposition annealing on the structure of ZnO and on the SAW device performance was studied. It was found that annealing ZnO above 600o C is detrimental for SAW device performance. Surface roughness of ZnO increases as the annealing temperature increases. In literature, roughness increase is presented as one of the reasons behind device breakdown. This work shows that roughness is not the primary cause for the breakdown. In addition, effect of SiO2 interlayer insertion between ZnO/Si structure on the device performance was examined together with the effect of ZnO thickness.en_US
dc.description.provenanceMade available in DSpace on 2016-01-08T18:26:12Z (GMT). No. of bitstreams: 1 0006588.pdf: 15374966 bytes, checksum: 20ec4dfa45204f14f5f24acbb3798b7a (MD5)en
dc.description.statementofresponsibilityNoyan, Mehmet Alicanen_US
dc.format.extentxiii, 93 leaves, illustrations, graphsen_US
dc.identifier.urihttp://hdl.handle.net/11693/15889
dc.language.isoEnglishen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectSurface acoustic wave (SAW) deviceen_US
dc.subjectZinc oxide (ZnO)en_US
dc.subjectSputteringen_US
dc.subjectPost-deposition annealingen_US
dc.subject.lccTK5981 .N69 2013en_US
dc.subject.lcshAcoustic surface wave devices.en_US
dc.subject.lcshZinc oxide.en_US
dc.titleFabrication and characterization of zinc oxide based surface acoustic wave devicesen_US
dc.typeThesisen_US
thesis.degree.disciplineMaterials Science and Nanotechnology
thesis.degree.grantorBilkent University
thesis.degree.levelMaster's
thesis.degree.nameMS (Master of Science)

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