Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process

Date
2017
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Source Title
Journal of Infrared, Millimeter, and Terahertz Waves
Print ISSN
1866-6892
Electronic ISSN
Publisher
Springer New York LLC
Volume
38
Issue
8
Pages
945 - 957
Language
English
Type
Article
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Abstract

This paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-μm-thick glass substrate is formed through the HF etching of a standard 500-μm-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30° angle of incidence. The second design consists of a tripole structure on top of a 100-μm-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30° angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20° angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-μm-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations. © 2017, Springer Science+Business Media New York.

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Keywords
Bandpass filters, Frequency selective surfaces, HF etching, Metamaterials, Microfabrication, Periodic structures, Pyrex glass, Terahertz, Bandpass filters, Bandwidth, Etching, Fabrication, Frequency selective surfaces, Glass, Metamaterials, Microanalysis, Microfabrication, Micromachining, Periodic structures, Terahertz spectroscopy, Wave transmission, Electromagnetic simulation, HF etching, Micro-fabrication techniques, Micromachining process, Pyrex glass, Tera Hertz, Terahertz frequencies, Transmission bandwidth, Substrates
Citation
Published Version (Please cite this version)