Integrated optical displacement sensors for scanning force microscopies

buir.advisorAydınlı, Atilla
dc.contributor.authorKocabaş, Coşkun
dc.departmentDepartment of Physicsen_US
dc.descriptionCataloged from PDF version of article.en_US
dc.description.abstractIn this thesis, we have studied the use of integrated optical waveguide devices acting as integrated displacement sensors on cantilevers for scanning probe microscopes. These displacement sensors include integrated optical waveguide devices such as Bragg gratings, ring resonators, race track resonators and waveguide Michelson interferometers fabricated on a cantilever to measure the displacement of the cantilever tip due to the forces between surface and the tip. The displacement of the cantilever tip is measured directly from the change of the transmission characteristics of the optical device. As the cantilever tip displaces, the stress on the cantilever surface changes the refractive index of the materials that make up the integrated optical device which cause variations in its optical transmission characteristics. We have also studied an optical waveguide grating coupler fabricated on the cantilever for the same purpose. In two different embodiments of this device, light is either coupled in or out of the waveguide via the waveguide grating coupler. The displacement of the cantilever alters the direction of the scattered light and measuring the power of the scattered light with a position sensitive detector allows for the detection of cantilever i tip displacement. The novel design proposed in this work provides very high displacement sensitivity of the order of 10−4˚A−1 .en_US
dc.description.statementofresponsibilityKocabaş, Coşkunen_US
dc.format.extentxiii, 89 leaves, illustrations, tables, graphs, 30 cmen_US
dc.publisherBilkent Universityen_US
dc.subjectScanning Probe Microscopyen_US
dc.subjectScanning Force Microscopyen_US
dc.subjectMachZehnder interferometeren_US
dc.subjectRing resonatoren_US
dc.subjectGrating coupleren_US
dc.subjectDisplacement sensoren_US
dc.subjectIntegrated opticsen_US
dc.subjectWaveguide sensorsen_US
dc.subject.lccQH212.S33 K63 2003en_US
dc.subject.lcshScanning probe microscopy.en_US
dc.titleIntegrated optical displacement sensors for scanning force microscopiesen_US
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