Design and finite element simulation of a novel 3D-CMUT device for simultaneous sensing of in-plane and out-of-plane displacements of ultrasonic guided waves

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buir.contributor.authorYilmaz, Mehmet
buir.contributor.orcidYilmaz, Mehmet|0000-0001-5496-6212
dc.citation.epage8706-17en_US
dc.citation.issueNumber21
dc.citation.spage8706-1
dc.citation.volumeNumber23
dc.contributor.authorZhang, S.
dc.contributor.authorLu, W.
dc.contributor.authorWang, A.
dc.contributor.authorHao, G.
dc.contributor.authorWang, R.
dc.contributor.authorYilmaz, Mehmet
dc.date.accessioned2024-03-08T19:07:59Z
dc.date.available2024-03-08T19:07:59Z
dc.date.issued2023-10-25
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)
dc.description.abstractIn this study, we introduce a physical model of a three-dimensional (3D) guided wave sensor called 3D-CMUT, which is based on capacitive micro-machined ultrasonic transducers (CMUTs). This 3D-CMUT sensor is designed to effectively and simultaneously obtain 3D vibration information about ultrasonic guided waves in the out-of-plane (z-direction) and in-plane (x and y-directions). The basic unit of the 3D-CMUT is much smaller than the wavelength of the guided waves and consists of two orthogonal comb-like CMUT cells and one piston-type CMUT cell. These cells are used to sense displacement signals in the x, y, and z-directions. To ensure proper functioning of the 3D-CMUT unit, the resonant frequencies of the three composed cells are set to be identical by adjusting the microstructural parameters appropriately. Moreover, the same sensitivity in the x, y, and z-directions is theoretically achieved by tuning the amplification parameters in the external circuit. We establish a transient analysis model of the 3D-CMUT using COMSOL finite element simulation software to confirm its ability to sense multimode ultrasonic guided waves, including A0, S0, and SH0 modes. Additionally, we simulate the ball drop impact acoustic emission signal on a plate to demonstrate that the 3D-CMUT can not only utilize in-plane information for positioning but also out-of-plane information. The proposed 3D-CMUT holds significant potential for applications in the field of structural health monitoring (SHM).
dc.identifier.doi10.3390/s23218706
dc.identifier.eissn1424-8220
dc.identifier.urihttps://hdl.handle.net/11693/114433
dc.language.isoen
dc.publisherMDPI AG
dc.relation.isversionofhttps://doi.org/10.3390/s23218706
dc.rights.licenseCC BY
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.source.titleSensors
dc.subjectUltrasonic guided waves
dc.subjectIn-plane displacement
dc.subjectOut-of-plane displacement
dc.subjectCMUT
dc.subject3D
dc.titleDesign and finite element simulation of a novel 3D-CMUT device for simultaneous sensing of in-plane and out-of-plane displacements of ultrasonic guided waves
dc.typeArticle

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