Defect reduction of Ge on Si by selective epitaxy and hydrogen annealing
Date
2008-10
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ECS Transactions
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AFM, Capacitor structures, Defect reductions, Dislocation densities, Hetero epitaxies, High qualities, Hydrogen annealing, In-situ doping, Monolithic integrations, Selective depositions, Selective epitaxies, Si CMOS, Epitaxial growth, Hydrogen, Monolithic integrated circuits, MOS capacitors, Semiconducting germanium compounds, Semiconducting silicon compounds, Silicon, Silicon alloys, Germanium
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English