High-speed solar-blind AlGaN Schottky photodiodes

Date
2003
Advisor
Instructor
Source Title
Proceedings of the Materials Research Society Symposium, MRS 2003
Print ISSN
0272-9172
Electronic ISSN
Publisher
Cambridge University Press
Volume
764
Issue
Pages
355 - 360
Language
English
Type
Conference Paper
Journal Title
Journal ISSN
Volume Title
Abstract

We report high-speed solar-blind AlGaN-based Schottky photodiodes. AlGaN/GaN heterostructure device layers were grown on sapphire substrate. The devices were fabricated on AlGaN/GaN heterostructuresusing a microwave compatible fabrication process. Schottky photodiodes with Au and indium-tin-oxide (ITO) Schottky contacts were fabricated. Current-voltage, spectral responsivity, and high-speed measurements were performed. Both Schottky samples exhibited very low sub-pA dark currents at high reverse bias. A bias dependent spectral responsivity was observed with a peak responsivity of 89 mA/W at 267 nm, and 44 mA/W at 263 nm for Au and ITO-Schottky devices respectively. Time-based high-frequency measurements at 267 nm resulted in pulse responses with rise times and pulse-widths as short as 13 ps and 74 ps respectively. The fastest solar-blind detector had a record 3-dB bandwidth of 1.10 GHz.

Course
Other identifiers
Book Title
Keywords
Aluminum compounds, Crystal structure, Current voltage characteristics, Epitaxial growth, Heterojunctions, Microwaves, Photodetectors, Reactive ion etching, Schottky barrier diodes, Dark currents, Reverse bias, Solar-blind operation, Spectral responsibility, Photodiodes
Citation
Published Version (Please cite this version)