Room temperature scanning Hall probe microscopy using GaAs/AlGaAs and Bi micro-hall probes
Date
2002
Authors
Sandhu, A.
Masuda, H.
Oral, A.
Yamada, A.
Konagai, M.
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Abstract
A room temperature scanning Hall probe microscope system utilizing GaAs/AlGaAs and bismuth micro-Hall probes was used for magnetic imaging of ferromagnetic domain structures on the surfaces of crystalline thin film garnets and permanent magnets. The Bi micro-Hall probes had dimensions ranging between 0.25 and 2.8μm2 and were fabricated using a combination of optical lithography and focused ion beam milling. The use of bismuth was found to overcome surface depletion effects associated with semiconducting micro-Hall probes. Our experiments demonstrated that Bi is a practical choice of material for fabricating sub-micron sized Hall sensors.
Source Title
Ultramicroscopy
Publisher
Elsevier Science B.V.
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Keywords
Bismuth, Ferromagnetic domains, GaAs, Garnets, Hall sensors, Nanotechnology, Permanent magnetics, Bismuth, Garnets, Ion beams, Permanent magnets, Photolithography, Semiconducting gallium arsenide, Thin films, Micro-Hall probes, Microscopic examination, Bismuth, Crystallin, Ferromagnetic material, Ion, Depletion, Film, Imaging, Magnet, Microscopy, Room temperature, Semiconductor, Sensor
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English