Room temperature scanning Hall probe microscopy using GaAs/AlGaAs and Bi micro-hall probes
Date
2002
Authors
Sandhu, A.
Masuda, H.
Oral, A.
Yamada, A.
Konagai, M.
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Supervisor
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Instructor
Source Title
Ultramicroscopy
Print ISSN
0304-3991
Electronic ISSN
Publisher
Elsevier Science B.V.
Volume
91
Issue
1-4
Pages
97 - 101
Language
English
Type
Journal Title
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Abstract
A room temperature scanning Hall probe microscope system utilizing GaAs/AlGaAs and bismuth micro-Hall probes was used for magnetic imaging of ferromagnetic domain structures on the surfaces of crystalline thin film garnets and permanent magnets. The Bi micro-Hall probes had dimensions ranging between 0.25 and 2.8μm2 and were fabricated using a combination of optical lithography and focused ion beam milling. The use of bismuth was found to overcome surface depletion effects associated with semiconducting micro-Hall probes. Our experiments demonstrated that Bi is a practical choice of material for fabricating sub-micron sized Hall sensors.
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Keywords
Bismuth , Ferromagnetic domains , GaAs , Garnets , Hall sensors , Nanotechnology , Permanent magnetics , Bismuth , Garnets , Ion beams , Permanent magnets , Photolithography , Semiconducting gallium arsenide , Thin films , Micro-Hall probes , Microscopic examination , Bismuth , Crystallin , Ferromagnetic material , Ion , Depletion , Film , Imaging , Magnet , Microscopy , Room temperature , Semiconductor , Sensor