An equivalent circuit for collapse operation mode of CMUTs

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage446en_US
dc.citation.spage443en_US
dc.contributor.authorOlcum, Selimen_US
dc.contributor.authorYamaner F.Y.en_US
dc.contributor.authorBozkurt, A.en_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.coverage.spatialSan Diego, CA, USAen_US
dc.date.accessioned2016-02-08T12:21:17Z
dc.date.available2016-02-08T12:21:17Z
dc.date.issued2010en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionDate of Conference: 11-14 Oct. 2010en_US
dc.description.abstractCollapse mode of operation of the capacitive mi-cromachined ultrasonic transducers (CMUTs) was shown to be a very effective way for achieving high output pressures. However, no accurate model exists for understanding the mechanics and limits of the collapse mode. In this work, we extend the analyses made for CMUTs working in uncollapsed mode to collapsed mode. We have developed an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT under any large signal electrical excitation. The static and dynamic deflections of a membrane predicted by the model are compared with the finite element simulations. The equivalent circuit model can estimate the static deflection within 1% and the transient behavior of a CMUT membrane within 3% accuracy. The circuit model is also compared to experimental results of pulse excitation applied to fabricated collapse mode CMUTs. The model is suitable as a powerful design and optimization tool for the collapsed as well as the uncollapsed case of CMUTs. © 2010 IEEE.en_US
dc.identifier.doi10.1109/ULTSYM.2010.5935697en_US
dc.identifier.issn1051-0117
dc.identifier.urihttp://hdl.handle.net/11693/28460
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2010.5935697en_US
dc.source.title2010 IEEE International Ultrasonics Symposiumen_US
dc.subjectCircuit modelsen_US
dc.subjectCollapse modeen_US
dc.subjectDesign and optimizationen_US
dc.subjectElectrical excitationen_US
dc.subjectEquivalent circuit modelen_US
dc.subjectFinite element simulationsen_US
dc.subjectHigh outputen_US
dc.subjectLarge-signalsen_US
dc.subjectMechanical behavioren_US
dc.subjectNonlinear electrical circuiten_US
dc.subjectOperation modeen_US
dc.subjectPulse excitationen_US
dc.subjectStatic and dynamicen_US
dc.subjectStatic deflectionsen_US
dc.subjectTransient behavioren_US
dc.subjectCircuit theoryen_US
dc.subjectCollapsible tubesen_US
dc.subjectComputer simulationen_US
dc.subjectFinite element methoden_US
dc.subjectUltrasonicsen_US
dc.subjectUltrasonic transducersen_US
dc.titleAn equivalent circuit for collapse operation mode of CMUTsen_US
dc.typeConference Paperen_US
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