Buried waveguides written deep inside silicon

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dc.contributor.authorTurnalı, Ahmeten_US
dc.contributor.authorTokel, Onuren_US
dc.contributor.authorKesim, Denizhan Korayen_US
dc.contributor.authorMakey, Ghaithen_US
dc.contributor.authorElahi, Parvizen_US
dc.contributor.authorİlday, Fatih Ömeren_US
dc.coverage.spatialMunich, Germanyen_US
dc.date.accessioned2018-04-12T11:47:22Z
dc.date.available2018-04-12T11:47:22Z
dc.date.issued2017en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.descriptionDate of Conference: 25-29 June 2017en_US
dc.descriptionConference Name: European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017en_US
dc.description.abstractSummary form only given. Silicon waveguides are widely used as optical interconnects and they are particularly important for Si-photonics. Si-based devices, along with other optical elements, are entirely fabricated on the top surface of Si wafers. However, further integration of photonic and electronic devices in the same chip requires a new approach. One alternative is to utilize the bulk of the wafer for fabricating photonic elements. Recently, we reported a direct-laser-writing method that exploits nonlinear interactions and can generate subsurface modifications inside silicon without damaging the surface. Using this method, we fabricated several functional optical elements including gratings, lenses, and holograms. In this work, we demonstrate optical waveguides entirely embedded in Si.en_US
dc.identifier.doi10.1109/CLEOE-EQEC.2017.8087284en_US
dc.identifier.urihttp://hdl.handle.net/11693/37669
dc.language.isoEnglishen_US
dc.publisherOSAen_US
dc.relation.isversionofhttps://doi.org/10.1109/CLEOE-EQEC.2017.8087284en_US
dc.source.titleProceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017en_US
dc.subjectOptical waveguidesen_US
dc.subjectSiliconen_US
dc.subjectWaveguide lasersen_US
dc.subjectPhotonicsen_US
dc.subjectNonlinear opticsen_US
dc.subjectOptical amplifiersen_US
dc.titleBuried waveguides written deep inside siliconen_US
dc.typeConference Paperen_US

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