An improved lumped element nonlinear circuit model for a circular CMUT cell

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1799en_US
dc.citation.issueNumber8en_US
dc.citation.spage1791en_US
dc.citation.volumeNumber59en_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorAydogdu, E.en_US
dc.contributor.authorKocabas, C.en_US
dc.contributor.authorOguz, H. K.en_US
dc.contributor.authorOlcum, S.en_US
dc.contributor.authorOzgurluk, A.en_US
dc.contributor.authorUnlugedik, A.en_US
dc.date.accessioned2015-07-28T12:05:02Z
dc.date.available2015-07-28T12:05:02Z
dc.date.issued2012en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractThis paper describes a correction and an extension in the previously published large signal equivalent circuit model for a circular capacitive micromachined ultrasonic transducer (CMUT) cell. The force model is rederived so that the energy and power is preserved in the equivalent circuit model. The model is able to predict the entire behavior of CMUT until the membrane touches the substrate. Many intrinsic properties of the CMUT cell, such as the collapse condition, collapse voltage, the voltage-displacement interrelation and the force equilibrium before and after collapse voltage in the presence of external static force, are obtained as a direct consequence of the model. The small signal equivalent circuit for any bias condition is obtained from the large signal model. The model can be implemented in circuit simulation tools and model predictions are in excellent agreement with finite element method simulations.en_US
dc.identifier.doi10.1109/TUFFC.2012.2383en_US
dc.identifier.issn0885–3010
dc.identifier.urihttp://hdl.handle.net/11693/13190
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/TUFFC.2012.2383en_US
dc.source.titleIEEE Trans on Ultrasonics, Ferroelectrics and Frequency Conten_US
dc.subjectBias conditionsen_US
dc.subjectCapacitive micromachined ultrasonic transduceren_US
dc.subjectCollapse conditionsen_US
dc.subjectCollapse voltageen_US
dc.subjectEquivalent circuit modelen_US
dc.subjectFinite element method simulationen_US
dc.subjectForce equilibriumen_US
dc.subjectForce modelen_US
dc.subjectIntrinsic propertyen_US
dc.subjectLarge-signal equivalent circuiten_US
dc.titleAn improved lumped element nonlinear circuit model for a circular CMUT cellen_US
dc.typeArticleen_US

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