Unbiased charged circular CMUT microphone: lumped-element modeling and performance

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage71
dc.citation.issueNumber1
dc.citation.spage60
dc.citation.volumeNumber65
dc.contributor.authorKöymen, Hayrettin
dc.contributor.authorAtalar, Abdullah
dc.contributor.authorGüler, S.
dc.contributor.authorKöymen, I.
dc.contributor.authorTaşdelen, A. S.
dc.contributor.authorÜnlügedik, A.
dc.date.accessioned2019-02-21T16:06:05Z
dc.date.available2019-02-21T16:06:05Z
dc.date.issued2018
dc.departmentDepartment of Electrical and Electronics Engineering
dc.departmentAcoustics and Underwater Technologies Research Center (BASTA)
dc.description.abstractAn energy-consistent lumped-element equivalent circuit model for charged circular capacitive micromachined ultrasonic transducer (CMUT) cell is derived and presented. It is analytically shown and experimentally verified that a series dc voltage source at the electrical terminals is sufficient to model the charging in CMUT. A model-based method for determining this potential from impedance measurements at low bias voltages is presented. The model is validated experimentally using an airborne CMUT, which resonates at 103 kHz. Impedance measurements, reception measurements at resonance and off-resonance, and the transient response of the CMUT are compared with the model predictions.
dc.description.sponsorshipManuscript received July 24, 2017; accepted November 10, 2017. Date of publication November 14, 2017; date of current version January 1, 2018. This work was supported by the Scientific and Technological Research Council of Turkey under Project 114E588. The work of A. Atalar was supported by the Turkish Academy of Sciences. (Corresponding author: Hayrettin Köymen.) H. Köymen, A. Atalar, and I. Köymen are with the Electrical and Electronics Engineering Department, Bilkent University, 06800 Ankara, Turkey (e-mail: koymen. . bilkent.edu.tr).
dc.identifier.doi10.1109/TUFFC.2017.2773490
dc.identifier.eissn1525-8955
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/50290
dc.language.isoEnglish
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.isversionofhttps://doi.org/10.1109/TUFFC.2017.2773490
dc.relation.projectBilkent Üniversitesi - Türkiye Bilimler Akademisi, TÜBA - Türkiye Bilimsel ve Teknolojik Araştirma Kurumu, TÜBITAK: 114E588
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
dc.subjectAirborne
dc.subjectCharging
dc.subjectCMUT
dc.subjectElectret
dc.subjectLumped-element equivalent circuit model
dc.titleUnbiased charged circular CMUT microphone: lumped-element modeling and performance
dc.typeArticle

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