Unbiased charged circular CMUT microphone: lumped-element modeling and performance

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buir.contributor.authorAtalar, Abdullah
buir.contributor.authorKöymen, Hayrettin
buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage71en_US
dc.citation.issueNumber1en_US
dc.citation.spage60en_US
dc.citation.volumeNumber65en_US
dc.contributor.authorKöymen, Hayrettinen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorGüler, S.en_US
dc.contributor.authorKöymen, I.en_US
dc.contributor.authorTaşdelen, A. S.en_US
dc.contributor.authorÜnlügedik, A.en_US
dc.date.accessioned2019-02-21T16:06:05Z
dc.date.available2019-02-21T16:06:05Z
dc.date.issued2018en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentAcoustics and Underwater Technologies Research Center (BASTA)en_US
dc.description.abstractAn energy-consistent lumped-element equivalent circuit model for charged circular capacitive micromachined ultrasonic transducer (CMUT) cell is derived and presented. It is analytically shown and experimentally verified that a series dc voltage source at the electrical terminals is sufficient to model the charging in CMUT. A model-based method for determining this potential from impedance measurements at low bias voltages is presented. The model is validated experimentally using an airborne CMUT, which resonates at 103 kHz. Impedance measurements, reception measurements at resonance and off-resonance, and the transient response of the CMUT are compared with the model predictions.
dc.description.provenanceMade available in DSpace on 2019-02-21T16:06:05Z (GMT). No. of bitstreams: 1 Bilkent-research-paper.pdf: 222869 bytes, checksum: 842af2b9bd649e7f548593affdbafbb3 (MD5) Previous issue date: 2018en
dc.description.sponsorshipManuscript received July 24, 2017; accepted November 10, 2017. Date of publication November 14, 2017; date of current version January 1, 2018. This work was supported by the Scientific and Technological Research Council of Turkey under Project 114E588. The work of A. Atalar was supported by the Turkish Academy of Sciences. (Corresponding author: Hayrettin Köymen.) H. Köymen, A. Atalar, and I. Köymen are with the Electrical and Electronics Engineering Department, Bilkent University, 06800 Ankara, Turkey (e-mail: koymen. . bilkent.edu.tr).
dc.identifier.doi10.1109/TUFFC.2017.2773490
dc.identifier.eissn1525-8955
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/50290
dc.language.isoEnglish
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.isversionofhttps://doi.org/10.1109/TUFFC.2017.2773490
dc.relation.projectBilkent Üniversitesi - Türkiye Bilimler Akademisi, TÜBA - Türkiye Bilimsel ve Teknolojik Araştirma Kurumu, TÜBITAK: 114E588
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Controlen_US
dc.subjectAirborneen_US
dc.subjectChargingen_US
dc.subjectCMUTen_US
dc.subjectElectreten_US
dc.subjectLumped-element equivalent circuit modelen_US
dc.titleUnbiased charged circular CMUT microphone: lumped-element modeling and performanceen_US
dc.typeArticleen_US

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