Lumped element model of single CMUT in collapsed mode

Abstract

In this study, an equivalent electrical circuit model for a single circular CMUT in both uncollapsed and collapsed modes is obtained. In order to model the collapsed mode mechanics, the governing differential equation is solved semi-analytically for a large number of normalized cases. Then the calculations are adapted to the equivalent electrical circuit model. The model uses the self radiation impedance of both uncollapsed and collapsed modes. The model is fully parametric in such a way that a CMUT cell of given dimensions and parameters can be simulated under an arbitrary large signal excitation. Transient simulations can be performed in less than a minute with a circuit simulator. Transient and frequency domain simulations are consistent with finite element analysis results. © 2013 IEEE.