A plasmonically enhanced pixel structure for uncooled microbolometer detectors

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buir.contributor.authorOkyay, Ali Kemal
dc.citation.volumeNumber8704en_US
dc.contributor.authorErturk O.en_US
dc.contributor.authorBattal, Enesen_US
dc.contributor.authorKucuk, S.E.en_US
dc.contributor.authorOkyay, Ali Kemalen_US
dc.contributor.authorAkin, T.en_US
dc.coverage.spatialBaltimore, Maryland, United Statesen_US
dc.date.accessioned2016-02-08T12:07:17Z
dc.date.available2016-02-08T12:07:17Z
dc.date.issued2013en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionDate of Conference: 29 April–3 May 2013en_US
dc.descriptionConference name: Proceedings of SPIE, Infrared Technology and Applications XXXIXen_US
dc.description.abstractThis paper introduces a method of broadband absorption enhancement that can be integrated with the conventional suspended microbolometer process with no significant additional cost. The premise of this study is that electric field can be enhanced throughout the structural layer of the microbolometer, resulting in an increase in the absorption of the infrared radiation in the long wave infrared window. A concentric double C-shaped plasmonic geometry is simulated using the FDTD method, and this geometry is fabricated on suspended pixel arrays. Simulation results and FTIR measurements are in good agreement indicating a broadband absorption enhancement in the 8 μm - 12 μm range for LWIR applications. The enhancement is attained using metallic geometries embedded in the structural layer of the suspended microbridge, where the metallic-dielectric interface increases the average absorption of a 35 μm pixel from 67.6% to 80.1%. © 2013 SPIE.en_US
dc.identifier.doi10.1117/12.2019540en_US
dc.identifier.urihttp://hdl.handle.net/11693/27977
dc.language.isoEnglishen_US
dc.publisherSPIEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1117/12.2019540en_US
dc.source.titleProceedings of SPIEen_US
dc.subjectMicrobolometeren_US
dc.subjectLong wave infrareden_US
dc.subjectMicrobolometeren_US
dc.subjectReflection suppressionen_US
dc.subjectSurface plasmonsen_US
dc.subjectWide-banden_US
dc.subjectBolometersen_US
dc.subjectElectric fieldsen_US
dc.subjectFinite difference time domain methoden_US
dc.subjectGeometryen_US
dc.subjectInfrared radiationen_US
dc.subjectPixelsen_US
dc.subjectPlasmonsen_US
dc.subjectTemperature sensorsen_US
dc.titleA plasmonically enhanced pixel structure for uncooled microbolometer detectorsen_US
dc.typeConference Paperen_US

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