Bias in bonding behavior among boron, carbon, and nitrogen atoms in ion implanted a-BN, a-BC, and diamond like carbon films
dc.citation.issueNumber | 7 | en_US |
dc.citation.volumeNumber | 110 | en_US |
dc.contributor.author | Genisel, M. F. | en_US |
dc.contributor.author | Uddin, M. N. | en_US |
dc.contributor.author | Say, Z. | en_US |
dc.contributor.author | Kulakci, M. | en_US |
dc.contributor.author | Turan, R. | en_US |
dc.contributor.author | Gulseren, O. | en_US |
dc.contributor.author | Bengu, E. | en_US |
dc.date.accessioned | 2016-02-08T09:50:49Z | |
dc.date.available | 2016-02-08T09:50:49Z | |
dc.date.issued | 2011 | en_US |
dc.department | Department of Chemistry | en_US |
dc.department | Department of Physics | en_US |
dc.description.abstract | In this study, we implanted Nþ and Nþ 2 ions into sputter deposited amorphous boron carbide (a-BC) and diamond like carbon (DLC) thin films in an effort to understand the chemical bonding involved and investigate possible phase separation routes in boron carbon nitride (BCN) films. In addition, we investigated the effect of implanted Cþ ions in sputter deposited amorphous boron nitride (a-BN) films. Implanted ion energies for all ion species were set at 40 KeV. Implanted films were then analyzed using x-ray photoelectron spectroscopy (XPS). The changes in the chemical composition and bonding chemistry due to ion-implantation were examined at different depths of the films using sequential ion-beam etching and high resolution XPS analysis cycles. A comparative analysis has been made with the results from sputter deposited BCN films suggesting that implanted nitrogen and carbon atoms behaved very similar to nitrogen and carbon atoms in sputter deposited BCN films. We found that implanted nitrogen atoms would prefer bonding to carbon atoms in the films only if there is no boron atom in the vicinity or after all available boron atoms have been saturated with nitrogen. Implanted carbon atoms also preferred to either bond with available boron atoms or, more likely bonded with other implanted carbon atoms. These results were also supported by ab-initio density functional theory calculations which indicated that carbon-carbon bonds were energetically preferable to carbon-boron and carbon-nitrogen bonds. | en_US |
dc.description.provenance | Made available in DSpace on 2016-02-08T09:50:49Z (GMT). No. of bitstreams: 1 bilkent-research-paper.pdf: 70227 bytes, checksum: 26e812c6f5156f83f0e77b261a471b5a (MD5) Previous issue date: 2011 | en |
dc.identifier.doi | 10.1063/1.3638129 | en_US |
dc.identifier.eissn | 1089-7550 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.uri | http://hdl.handle.net/11693/21763 | |
dc.language.iso | English | en_US |
dc.relation.isversionof | http://dx.doi.org/10.1063/1.3638129 | en_US |
dc.source.title | Journal of Applied Physics | en_US |
dc.subject | Ab initio | en_US |
dc.subject | Amorphous boron | en_US |
dc.subject | Amorphous boron nitride | en_US |
dc.subject | BCN films | en_US |
dc.subject | Bonding behavior | en_US |
dc.subject | Boron atom | en_US |
dc.subject | Boron carbon nitride | en_US |
dc.subject | Carbon atoms | en_US |
dc.subject | Carbon-carbon bond | en_US |
dc.subject | Chemical bondings | en_US |
dc.subject | Chemical compositions | en_US |
dc.subject | Comparative analysis | en_US |
dc.subject | Density functional theory calculations | en_US |
dc.subject | Diamond like carbon | en_US |
dc.subject | High resolution | en_US |
dc.subject | Implanted nitrogen | en_US |
dc.subject | Ion beam etching | en_US |
dc.subject | Ion energies | en_US |
dc.subject | Ion implanted | en_US |
dc.subject | Ion species | en_US |
dc.subject | Nitrogen atom | en_US |
dc.subject | XPS analysis | en_US |
dc.subject | Amorphous carbon | en_US |
dc.subject | Amorphous films | en_US |
dc.subject | Atoms | en_US |
dc.subject | Boron | en_US |
dc.subject | Boron carbide | en_US |
dc.subject | Carbon films | en_US |
dc.subject | Chemical analysis | en_US |
dc.subject | Chemical bonds | en_US |
dc.subject | Density functional theory | en_US |
dc.subject | Ions | en_US |
dc.subject | Nitrides | en_US |
dc.subject | Nitrogen | en_US |
dc.subject | Phase separation | en_US |
dc.subject | Photoelectron spectroscopy | en_US |
dc.subject | X ray photoelectron spectroscopy | en_US |
dc.subject | Diamond like carbon films | en_US |
dc.title | Bias in bonding behavior among boron, carbon, and nitrogen atoms in ion implanted a-BN, a-BC, and diamond like carbon films | en_US |
dc.type | Article | en_US |
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