Parametric nonlinear lumped element model for circular CMUTs in collapsed mode
Date
2014
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Source Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Print ISSN
0885-3010
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Volume
61
Issue
1
Pages
173 - 181
Language
English
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Abstract
We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations. © 2014 IEEE.
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Keywords
Analytical formulation , Electrical force , Equivalent circuit model , Excitation regime , FEM simulations , Lumped element model , Membrane deflections , Radiation impedance , Acoustics , Electronics engineering , Computer Simulation , Computer-Aided Design , Electric Capacitance , Electronics , Equipment Design , Equipment Failure Analysis , Miniaturization , Models, Theoretical , Nonlinear Dynamics , Transducers , Ultrasonography