Parametric nonlinear lumped element model for circular CMUTs in collapsed mode

Date
2014
Advisor
Instructor
Source Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Print ISSN
0885-3010
Electronic ISSN
Publisher
Volume
61
Issue
1
Pages
173 - 181
Language
English
Type
Article
Journal Title
Journal ISSN
Volume Title
Abstract

We present a parametric equivalent circuit model for a circular CMUT in collapsed mode. First, we calculate the collapsed membrane deflection, utilizing the exact electrical force distribution in the analytical formulation of membrane deflection. Then we develop a lumped element model of collapsed membrane operation. The radiation impedance for collapsed mode is also included in the model. The model is merged with the uncollapsed mode model to obtain a simulation tool that handles all CMUT behavior, in transmit or receive. Large- and small-signal operation of a single CMUT can be fully simulated for any excitation regime. The results are in good agreement with FEM simulations. © 2014 IEEE.

Course
Other identifiers
Book Title
Keywords
Analytical formulation, Electrical force, Equivalent circuit model, Excitation regime, FEM simulations, Lumped element model, Membrane deflections, Radiation impedance, Acoustics, Electronics engineering, Computer Simulation, Computer-Aided Design, Electric Capacitance, Electronics, Equipment Design, Equipment Failure Analysis, Miniaturization, Models, Theoretical, Nonlinear Dynamics, Transducers, Ultrasonography
Citation
Published Version (Please cite this version)