Reducing anchor loss in micromechanical extensional Mode resonators

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage454en_US
dc.citation.issueNumber2en_US
dc.citation.spage448en_US
dc.citation.volumeNumber57en_US
dc.contributor.authorTas, V.en_US
dc.contributor.authorOlcum, S.en_US
dc.contributor.authorAksoy, M. D.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.date.accessioned2015-07-28T11:58:43Z
dc.date.available2015-07-28T11:58:43Z
dc.date.issued2010-02en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractIn this work, we propose a novel method to increase the quality factor of extensional mode micromechanical resonators. The proposed resonator topology is suitable for integration in a silicon-based process to fabricate micromechanical filters and oscillators. It is a half-wavelength-long strip excited longitudinally by electrostatic forces, and it is isolated from the substrate by alternating with bars of a quarter wavelength long. This structure causes a large impedance mismatch between the resonator and the substrate and hence reduces the anchor loss considerably. The performance of the resonator is determined by finite element simulations. We introduce an equivalent electrical circuit to predict the performance of the resonator. The electrical model gives results consistent with the finite element simulations. The proposed resonator is expected to have a very small anchor loss resulting in a very high Q.en_US
dc.description.provenanceMade available in DSpace on 2015-07-28T11:58:43Z (GMT). No. of bitstreams: 1 10.1109-TUFFC.2010.1425.pdf: 914191 bytes, checksum: ab8283bc6f26a4b5f9236666ec878430 (MD5)en
dc.description.sponsorshipASELSANen_US
dc.description.sponsorshipTÜBİTAKen_US
dc.identifier.doi10.1109/TUFFC.2010.1425en_US
dc.identifier.issn0885-3010
dc.identifier.urihttp://hdl.handle.net/11693/11777
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/TUFFC.2010.1425en_US
dc.source.titleIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Controlen_US
dc.subjectElectrostaticsen_US
dc.subjectFinite element analysisen_US
dc.subjectMicromechanical resonatorsen_US
dc.titleReducing anchor loss in micromechanical extensional Mode resonatorsen_US
dc.typeArticleen_US

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