Designing transmitting CMUT cells for airborne applications

Date
2014
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Source Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Print ISSN
0885-3010
Electronic ISSN
Publisher
Institute of Electrical and Electronics Engineers Inc.
Volume
61
Issue
11
Pages
1899 - 1910
Language
English
Type
Article
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Abstract

We report a new mode of airborne operation for capacitive micromachined ultrasonic transducers (CMUT), in which the plate motion spans the entire gap without collapsing and the transducer is driven by a sinusoidal voltage without a dc bias. We present equivalent-circuit-based design fundamentals for an airborne CMUT cell and verify the design targets using fabricated CMUTs. The performance limits for silicon plates are derived. We experimentally obtain 78.9 dB//20 μPa@1 m source level at 73.7 kHz, with a CMUT cell of radius 2.05 mm driven by 71 V sinusoidal drive voltage at half the frequency. The measured quality factor is 120. We also study and discuss the interaction of the nonlinear transduction force and the nonlinearity of the plate compliance. © 1986-2012 IEEE.

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Keywords
Transducers, Airborne applications, Capacitive micromachined ultrasonic transducer, Nonlinear transduction, Performance limits, Quality factors, Silicon plates, Sinusoidal voltage, Sinusoidal-drive voltage, Ultrasonic transducers
Citation
Published Version (Please cite this version)