Differentiation of domains in composite surface structures by charge-contrast x-ray photoelectron spectroscopy

Date
2007
Advisor
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Source Title
Analytical Chemistry
Print ISSN
0003-2700
Electronic ISSN
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Volume
79
Issue
1
Pages
183 - 186
Language
English
Type
Article
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Abstract

An external bias is applied to two samples containing composite surface structures, while recording an XPS spectrum. Altering the polarity of the bias affects the extent of differential charging in domains that are chemically or electronically different to create a charge contrast. By utilizing this charge contrast, we show that two distinct silicon nitride and silicon oxynitride domains are present in one of the composite samples. Similarly, we use this technique to show that titanium oxide and silicon oxide domains exist as separate chemical entities in another composite sample. © 2007 American Chemical Society.

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Keywords
Composite samples, Silicon oxide, Silicon oxynitride, Silicon compounds, Silicon nitride, Spectrum analysis, Surface structure, Titanium oxides, X ray photoelectron spectroscopy, Composite materials, X ray
Citation
Published Version (Please cite this version)