A guide to properly select the defocusing distance for accurate solution of transport of intensity equation while testing aspheric surfaces
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2016
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In this paper, the Transport of Intensity Equation (TIE) for testing of an aspheric surface is verified experimentally. Using simulation, a proper defocus distance Δo that leads to an accurate solution of TIE is estimated whenever the conic constant and configuration of the experiment are known. To verify this procedure a non-nulled experiment for testing an aspheric is used. For verification of the solution, the results are compared with the Shack-Hartmann sensor. The theoretical method and experimental results are compared to validate the results.
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Proceedings of SPIE Vol. 9868, Dimensional Optical Metrology and Inspection for Practical Applications V
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SPIE
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English