The influence of thickness and ammonia flow rate on the properties of AIN layers

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buir.contributor.authorÖzbay, Ekmel
buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.citation.epage36en_US
dc.citation.issueNumber1en_US
dc.citation.spage32en_US
dc.citation.volumeNumber15en_US
dc.contributor.authorCorekci, S.en_US
dc.contributor.authorOzturk, M. K.en_US
dc.contributor.authorCakmak, M.en_US
dc.contributor.authorOzcelik, S.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.date.accessioned2015-07-28T12:05:06Z
dc.date.available2015-07-28T12:05:06Z
dc.date.issued2012en_US
dc.departmentDepartment of Physicsen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.description.abstractUndoped AlN layers have been grown on c-plane sapphire substrates by metal-organic chemical vapor deposition in order to study the effects of ammonia (NH3) flow rate and layer thickness on the structural quality and surface morphology of AlN layers by high-resolution X-ray diffraction, scanning electron microscopy, and atomic force microscopy. Lower NH3 flow rate improves crystallinity of the symmetric (0 0 0 2) plane in AlN layers. Ammonia flow rate is also correlated with surface quality; pit-free and smooth AlN surfaces have been obtained at a flow rate of 70 standard cm(3) per minute. Thicker AlN films improve the crystallinity of the asymmetric (1 0 1 (1) over bar 2) plane.en_US
dc.description.provenanceMade available in DSpace on 2015-07-28T12:05:06Z (GMT). No. of bitstreams: 1 10.1016-j.mssp.2011.06.003.pdf: 803570 bytes, checksum: 94b9b297feb733198b9249877b5769f4 (MD5)en
dc.identifier.doi10.1016/j.mssp.2011.06.003en_US
dc.identifier.issn1369-8001
dc.identifier.urihttp://hdl.handle.net/11693/13206
dc.language.isoEnglishen_US
dc.publisherElsevieren_US
dc.relation.isversionofhttp://dx.doi.org/10.1016/j.mssp.2011.06.003en_US
dc.source.titleMaterials Science in Semiconductor Processingen_US
dc.subjectALN thin filmsen_US
dc.subjectAmmonia flow rateen_US
dc.titleThe influence of thickness and ammonia flow rate on the properties of AIN layersen_US
dc.typeArticleen_US

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