Highly stable periodic structures using nonlinear laser lithography

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Abstract

Nonlinear laser lithography (NLL) emerged as a novel surface structuring method allowing long-range periodic order. We present mathematical formalism for NLL, analysis of structure stability to perturbations and a way to control final tiling patterns.

Source Title

Proceedings of the 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

Publisher

IEEE

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Citation

Published Version (Please cite this version)

Language

English