Band-Bending at buried SiO2/Si interface as probed by XPS

Date
2013
Advisor
Instructor
Source Title
ACS Applied Materials and Interfaces
Print ISSN
1944-8244
Electronic ISSN
1944-8252
Publisher
American Chemical Society
Volume
5
Issue
12
Pages
5875 - 5881
Language
English
Type
Article
Journal Title
Journal ISSN
Volume Title
Abstract

X-ray photoelectron spectroscopy is used to probe the photoinduced shifts in the binding energies of Si2p, O1s, and C1s of the SiO2/Si interfaces of a number of samples having oxide and/or thin organic layers on top of p- and n-Si wafers. Whereas the photoinduced shifts, in each and every peak related, vary from 0.2 to 0.5 eV for the p-type samples, the corresponding shifts are substantially smaller (<0.1 eV) for the n-type, regardless of (i) oxidation route (thermal or anodic), (ii) thickness of oxide layer, (iii) nature of organic layer, or (iv) color of three illuminating sources we have used. This leads us to conclude that these particular photoshifts reflect the charge state of the SiO2/Si interface, even in the case of a 20 nm thick oxide, where the interface is buried and cannot be probed directly by XPS.

Course
Other identifiers
Book Title
Keywords
Band-bending, Buried interface, Doping, Photovoltage, XPS
Citation
Published Version (Please cite this version)