High-refractive-index measurement with an elastromeric grating coupler

Date
2005
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Source Title
Optics Letters
Print ISSN
0146-9592
Electronic ISSN
1539-4794
Publisher
Optical Society of America
Volume
30
Issue
23
Pages
3150 - 3152
Language
English
Type
Article
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Abstract

An elastomeric grating coupler fabricated by the replica molding technique is used to measure the modal indices of a silicon-on-insulator (SOI) planar waveguide structure. Because of the van der Waals interaction between the grating mold and the waveguide, the elastomeric stamp makes conformal contact with the waveguide surface, inducing a periodic index perturbation at the contact region. The phase of the incident light is changed to match the guided modes of the waveguide. The modal and bulk indices are obtained by measuring the coupling angles. This technique serves to measure the high refractive index with a precision better than 10(-3) and allows the elastomeric stamp to be removed without damaging the surface of the waveguide.

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Keywords
Soft Lithography, Thin Films, Waves
Citation
Published Version (Please cite this version)