Browsing by Subject "Transparent conductive oxides"
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Item Open Access An all-ZnO microbolometer for infrared imaging(Elsevier BV, 2014) Kesim, Y. E.; Battal, E.; Tanrikulu, M. Y.; Okyay, Ali KemalMicrobolometers are extensively used for uncooled infrared imaging applications. These imaging units generally employ vanadium oxide or amorphous silicon as the active layer and silicon nitride as the absorber layer. However, using different materials for active and absorber layers increases the fabrication and integration complexity of the pixel structure. In order to reduce fabrication steps and therefore increase the yield and reduce the cost of the imaging arrays, a single layer can be employed both as the absorber and the active material. In this paper, we propose an all-ZnO microbolometer, where atomic layer deposition grown zinc oxide is employed both as the absorber and the active material. Optical constants of ZnO are measured and fed into finite-difference-time-domain simulations where absorption performances of microbolometers with different gap size and ZnO film thicknesses are extracted. Using the results of these optical simulations, thermal simulations are conducted using finite-element-method in order to extract the noise equivalent temperature difference (NETD) and thermal time constant values of several bolometer structures with different gap sizes, arm and film thicknesses. It is shown that the maximum performance of 171 mK can be achieved with a body thickness of 1.1 μm and arm thickness of 50 nm, while the fastest response with a time constant of 0.32 ms can be achieved with a ZnO thickness of 150 nm both in arms and body. © 2014 Elsevier B.V. All rights reserved.Item Open Access Disordered and densely packed ITO nanorods as an excellent lithography-free optical solar reflector metasurface(American Chemical Society, 2019) Yıldırım, Deniz Umut; Ghobadi, Amir; Soydan, Mahmut Can; Ateşal, Okan; Toprak, Ahmet; Çalışkan, Mehmet Deniz; Özbay, EkmelPrecise control and stabilization of the operating temperature environment of spacecraft and satellites during their life cycle is of paramount importance to increase device reliabilities and reduce the thermomechanical constraints. Optical solar reflectors are the physical interface between the spacecraft and space, and they are broadband mirrors for the solar spectrum, while having strong thermal emission in the mid-infrared part of the electromagnetic spectrum. Strong light–matter interactions in metamaterials and metasurfaces offer significant advantages compared to the conventional methods in performance, weight, launch, and assembly costs. However, the fabrication complexity of these metastructures due to necessitating lithography hinders their upscaling, reproducibility, large-area compatibility, and mass production. In this regard, we propose a facile, lithography-free fabrication route, exploiting oblique deposition to design a metasurface based on disordered and densely packed Indium Tin Oxide (ITO) nanorod forests. The excellent light trapping capability of the nanorod forests, randomness in the geometrical dimensions of these nanorods, combined with the lossy plasmonic nature of ITO in the thermal-infrared range led to strong coupling of thermal radiation to broad plasmonic resonances and, consequently, an experimental emissivity of 0.968, in a very wide range from 2.5 to 25 μm. In the solar spectrum, the low-loss dielectric characteristic of ITO resulted in an experimental solar absorptivity as small as 0.168. Our proposed design with high throughput, robustness, low cost, and high performance, therefore, shows great promise not only for space missions, but also for promoting environmentally friendly passive radiative cooling for our planet and thermal imaging in the field of security labeling.Item Open Access Disordered and densely packed ITO nanorods as an excellent lithography-free optical solar reflector metasurface for the radiative cooling of spacecraft(SPIE, 2019) Yıldırım, Deniz Umut; Ghobadi, Amir; Soydan, Mahmut Can; Ateşal, Okan; Toprak, Ahmet; Çalışkan, Mehmet Deniz; Özbay, EkmelOptical Solar Reflectors (OSRs) form the physical interface between the spacecraft and space and they are essential for the stabilization and uniform distribution of temperature throughout the spacecraft. OSRs need to possess a spectrally selective response of broadband and perfect electromagnetic wave absorption in the thermal-infrared spectral range, while strongly reflecting the solar energy input. In this work, we experimentally show that disordered and densely packed ITO nanorod forests can be used as an excellent top-layer metasurface in a metal-insulator-oxide cavity configuration, and a thermal-emissivity of 0.97 is experimentally realized in the spectral range from 2.5 to 25 μm. The low-loss dielectric response of ITO in the solar spectrum, from 300 nm to 2.5 μm range limited the solar absorptivity to an experimental value of 0.167. These make our proposed design highly promising for its application in space missions due to combining high throughput, robustness, low cost with ultra-high performance.Item Open Access Ultra-low-cost near-infrared photodetectors on silicon(SPIE, 2015-02) Nazirzadeh, M. Amin; Atar, Fatih B.; Turgut, B. Berkan; Okyay, Ali KemalWe demonstrate Silicon-only near-infrared (NIR) photodetectors (sensitive up to 2000 nm) that meet large-scale ultralow-cost fabrication requirements. For the detection of infrared photons, we use metal nanoislands that form Schottky contact with Silicon. NIR photons excite plasmon resonances at metal nanoislands and plasmons decay into highly energetic charge carriers (hot electrons). These hot electrons get injected into Silicon (internal photoemission), resulting in photocurrent. Several groups have studied plasmonic nanoantennas using high resolution lithography techniques. In this work, we make use of randomly formed nanoislands for broad-band photoresponse at NIR wavelengths. We observe photoresponse up to 2000 nm wavelength with low dark current density about 50 pA/μm2. The devices exhibit photoresponsivity values as high as 2 mA/W and 600 μA/W at 1.3 μm and 1.55 μm wavelengths, respectively. Thin metal layer was deposited on low-doped n-type Silicon wafer. Rapid thermal annealing results in surface reconstruction of the metal layer into nanoislands. Annealing conditions control the average size of the nanoislands and photoresponse of the devices. An Al-doped Zinc Oxide (AZO) layer was deposited on the nanoislands using thermal atomic layer deposition (ALD) technique to acts as a transparent conductive oxide (TCO) and patterned using photolithography. AZO film creates electrical connection between the nanoislands and also makes a heterojunction to Silicon. Simple and scalable fabrication on Si substrates without the need for any sub-micron lithography or high temperature epitaxy process make these devices good candidates for ultra-low-cost broad-band NIR imaging and spectroscopy applications. © 2015 SPIE.