Browsing by Subject "Thickness Determination"
Now showing 1 - 1 of 1
Results Per Page
Sort Options
Item Open Access XPS investigation of thin SiOx and SiOxNy overlayers(Elsevier, 1999-05-04) Birer, O.; Sayan, S.; Süzer, Şefik; Aydınlı, AtillaAngle-resolved XPS is used to determine the thickness and the uniformity of the chemical composition with respect to oxygen and nitrogen of the very thin silicon oxide and oxynitride overlayers grown on silicon. (C) 1999 Elsevier Science B.V. All rights reserved.