Browsing by Subject "Micro electromechanical system (MEMS)"

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    Nanomechanical motion transducers for miniaturized mechanical systems
    (MDPI AG, 2017) Kouh, T.; Hanay, M. S.; Ekinci, K. L.
    Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.