Browsing by Subject "Electron beam lithography"
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Item Open Access An array of surface-enhanced Raman scattering substrates based on plasmonic lenses(Wiley, 2012-10-01) Kahraman, M.; Cakmakyapan, S.; Özbay, Ekmel; Culha, M.An array of ring-shaped holes is prepared from silver thin films using electron beam lithography. The optimal conditions for high performance as a surface-enhanced Raman scattering (SERS) substrate are investigated. Either the diameter of the hole (0.5, 1.0, 2.0, 3.0 and 4.0 μm) or the slit width (200, 300, 400, 500 and 600 nm) is varied. 4-Aminothiophenol (ATP) adsorbed on the structures as a self-assembled monolayer (SAM) is used as probe to evaluate the SERS performance of the generated structures. It is found that there is an optimal configuration for ring-shaped holes with a 3.0-μm diameter and 200-nm slit width. The SERS activity on this optimal lens configuration is found to be 13 times greater than that of the activity on the silver thin film. An array of these structures at this optimal configuration can easily be constructed and used in a range of SERS-based sensing applications. An array of ring-shaped holes is prepared from silver thin films using electron beam lithography. The optimal conditions for high performance as a surface-enhanced Raman scattering (SERS) substrate are investigated. It is found that there is an optimal configuration for ring-shaped holes with a 3.0-μm diameter and 200-nm slit with. The SERS activity on this optimal lens configuration is found to be 13 times greater than that of the activity on the silver thin film.Item Open Access Developing a transducer based on localized surface plasmon resonance (LSPR) of gold nanostructures for nanobiosensor applications(Trans Tech Publications, 2013) Turhan, Adil Burak; Ataman, D.; Çakmakyapan, S.; Mutlu, M.; Özbay, Ekmel; Vlachos, D. S.; Hristoforou, E.In this work, we report the nanofabrication, optical characterization, and electromagnetic modeling of various nanostructure arrays for localized surface plasmon resonance (LSPR) based biosensing studies. Comparison of the experimental results and simulation outputs of various nanostructure arrays was made and a good correspondence was achieved.Item Open Access Directed assembly of charged nanoparticles by using electrostatic forces in a fluidic medium(Bilkent University, 2019-02) Sopubekova, ElizaDeposition of nanoparticles in a controlled manner is suitable for the application of unique properties of nanoparticles in designing novel electronic devices. Printing different types of nanoparticles on the same surface generates multifunctional surfaces and opens up possibilities to elaborate future devices. Electrostatic forces can potentially be utilized to manipulate different types of materials such as magnetic, insulating, conducting, semiconducting, organic and inorganic materials. Moreover, chemistry of materials and the surface is not altered. Herein, we applied these forces to direct and position charged nanoparticles on desired areas of the surface from nonpolar and aqueous dispersions. Assemblies of particles are obtained on both nonconductive surface with charged patterns and on metallic nano- and microstructured electrodes. Arrays of gold electrodes of sizes from 500 nm to 50 μm were prepared by using the conventional fabrication techniques such as photolithography, electron beam lithography, thermal evaporation and lift off. Charge patterns are formed on 100 nm PMMA surface which is coated on the electrodes to provide electrical contact. An external voltage was applied and substrate was immersed into desired aqueous negatively charged colloidal gold dispersion to direct nanoparticles on aforementioned charge patterns. The next step was to attract two different charged nanoparticles towards different locations on the same substrate by means of electrophoretic deposition. Assemblies formed from positively charged silver nanoparticles and negatively charged fluorescent latex and silica nanoparticles are demonstrated. Last but not least, composite structures were obtained with similar techniques in order to increase the functionality of the structured surface. To achieve this goal, different types of nanoparticles were coated on top of each other without changing the location of electrodes. The shape of these composite structures is controlled by the electrode geometry.Item Open Access E-Beam lithography designed substrates for surface enhanced Raman spectroscopy(Elsevier BV, 2015-06) Cinel, N. A.; Cakmakyapan, S.; Butun, S.; Ertas, G.; Özbay, EkmelSurface Enhanced Raman Spectroscopy (SERS) is a popular method that amplifies weak Raman signals from Raman-active analyte molecules making use of certain specially-prepared metallic surfaces. The main challenge in SERS is to design and fabricate highly repeatable, predictable, and sensitive substrates. There are many fabrication methods that strive to achieve this goal, which are briefly summarized in this paper. The E-beam lithography method is proposed to be superior to the mentioned techniques. In this paper, we review how EBL can be utilized in the preparation of SERS substrates and we discuss the contributions to the field by the Özbay group.Item Open Access Graphene field effect devices operating in differential circuit configuration(Elsevier, 2015) Nyffeler, C.; Hanay, M. S.; Sacchetto, D.; Leblebici, Y.We study the concept of a basic building block for circuits using differential signaling and being based on graphene field effect devices. We fabricated a number of top-gated graphene FETs using commercially available graphene and employing electron beam lithography along with other semiconductor manufacturing processes. These devices were then systematically measured in an automated setup and their DC characteristics analyzed in terms of a simple but effective analytical model. This model together with the collected data allowed us to proceed further with both mathematical analysis of circuit characteristics as well as numerical simulation in a dedicated circuit analysis software.Item Open Access Nanofabrication and plasma polymerization assisted surface modification of a transducer based on localized surface plasmon resonance of gold nanostructure arrays for biosensor applications(S P I E - International Society for Optical Engineering, 2012-07-31) Turhan, A. B.; Ataman, D.; Sen, Y.; Mutlu, M.; Özbay, EkmelThe nanofabrication and surface modification of a transducer based on localized surface plasmon resonance (LSPR) of gold nanostructure arrays for biosensing was studied. We used electron beam lithography for the nanopatterning technique, which let us choose LSPR sensor properties by providing immense control over nanostructural geometry. A critical step in the utilization of this transducer is to form a selective biolayer over the gold nanostructures. We applied plasma polymerization and wet chemistry techniques for ethylenediamine (EDA) modification and glutaraldehyde immobilization as intermediate layers, respectively. The gold nanostructure arrays were primarily modified using EDA in order to activate the surface with amine groups that are cross-linked with later added avidin molecules by the help of glutaraldhyde layer residing in between. The success of plasma polymerization was validated with x-ray photoelectron spectroscopy measurements. As a last step, we introduced biotin to the surface (biotin has a high affinity for avidin). We were able to detect the LSPR resonance wavelength shift in the transmission spectra at each step of modification, including the avidin-biotin interaction, which acts as a model for specific molecule detection using LSPR. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).Item Open Access Polymeric waveguide Bragg grating filter using soft lithography(Optical Society of American (OSA), 2006) Kocabas, A.; Aydınlı, AtillaWe use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters. © 2006 Optical Society of America.Item Open Access Self-resonant microlasers of colloidal quantum wells constructed by direct deep patterning(American Chemical Society, 2021-06-09) Gheshlaghi, Negar; Foroutan-Barenji, Sina; Erdem, Onur; Altintas, Yemliha; Shabani, Farzan; Humayun, Muhammad Hamza; Demir, Hilmi VolkanHere, the first account of self-resonant fully colloidal μ-lasers made from colloidal quantum well (CQW) solution is reported. A deep patterning technique is developed to fabricate well-defined high aspect-ratio on-chip CQW resonators made of grating waveguides and in-plane reflectors. The fabricated waveguide-coupled laser, enabling tight optical confinement, assures in-plane lasing. CQWs of the patterned layers are closed-packed with sharp edges and residual-free lifted-off surfaces. Additionally, the method is successfully applied to various nanoparticles including colloidal quantum dots and metal nanoparticles. It is observed that the patterning process does not affect the nanocrystals (NCs) immobilized in the attained patterns and the different physical and chemical properties of the NCs remain pristine. Thanks to the deep patterning capability of the proposed method, patterns of NCs with subwavelength lateral feature sizes and micron-scale heights can possibly be fabricated in high aspect ratios.