Browsing by Subject "Dielectric"
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Item Open Access Asymptotic wave-like modeling of dielectric lenses(IEEE, 2007) Yurchenko, V. B.; Altıntaş, AyhanWe propose asymptotic wave-like approximations for the accurate modeling of dielectric lenses used in quasi-optical systems of millimeter, submillimeter, and infrared wave applications. For the comparison, we obtain an exact full-wave solution of two-dimensional focusing lens problem and use it as a benchmark for testing and validation of asymptotic models being proposed.Item Open Access Electrical conduction and dielectric relaxation properties of AlN thin films grown by hollow-cathode plasma-assisted atomic layer deposition(Institute of Physics Publishing, 2016) Altuntas, H.; Bayrak, T.; Kizir, S.; Haider, A.; Bıyıklı, NecmiIn this study, aluminum nitride (AlN) thin films were deposited at 200 �C, on p-type silicon substrates utilizing a capacitively coupled hollow-cathode plasma source integrated atomic layer deposition (ALD) reactor. The structural properties of AlN were characterized by grazing incidence x-ray diffraction, by which we confirmed the hexagonal wurtzite single-phase crystalline structure. The films exhibited an optical band edge around ∼5.7 eV. The refractive index and extinction coefficient of the AlN films were measured via a spectroscopic ellipsometer. In addition, to investigate the electrical conduction mechanisms and dielectric properties, Al/AlN/p-Si metal-insulator-semiconductor capacitor structures were fabricated, and current density-voltage and frequency dependent (7 kHz-5 MHz) dielectric constant measurements (within the strong accumulation region) were performed. A peak of dielectric loss was observed at a frequency of 3 MHz and the Cole-Davidson empirical formula was used to determine the relaxation time. It was concluded that the native point defects such as nitrogen vacancies and DX centers formed with the involvement of Si atoms into the AlN layers might have influenced the electrical conduction and dielectric relaxation properties of the plasma-assisted ALD grown AlN films.Item Open Access Investigation of angstrom-thick aluminium oxide passivation layers to improve the gate lag performance of GaN HEMTs(IOP, 2019-07) Gülseren, Melisa Ekin; Kurt, Gökhan; Ulusoy Ghobadi, Türkan Gamze; Ghobadi, Amir; Salkım, Gurur; Öztürk, Mustafa; Bütün, Bayram; Özbay, EkmelIn this paper, we report an angstrom-thick atomic layer deposited (ALD) aluminum oxide (Al2O3) dielectric passivation layer for an AlGaN/GaN high electron mobility transistor (HEMT). Our results show a 55% improvement in the gate lag performance of the design and a decrease by half in interface state density upon coating with two cycles of ALD Al2O3. DC characteristics such as current density, threshold voltage, and leakage currents were maintained. ALD Al2O3 passivation layers with thicknesses up to 10 nm were investigated. XPS analyses reveal that the first ALD cycles are sufficient to passivate GaN surface traps. This study demonstrates that efficient passivation can be achieved in atomic-scale with dimensions much thinner than commonly used bulk layers.