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Item Open Access CMUT array element in deep-collapse mode(IEEE, 2011) Olcum, Semih; Yamaner F.Y.; Bozkurt, A.; Köymen, Hayrettin; Atalar, AbdullahCollapse and deep-collapse mode of operations have boosted the pressure outputs of capacitive micromachined ultrasonic transducers (CMUTs) considerably. In this work, we demonstrate a CMUT element operating in the deep-collapse mode with 25 V pulse excitation and without the effects of charge trapping. The fabricated CMUT element consists of 4 by 4 circular cells with 20 μm radius and 1 μm thick plates suspended over a 50 nm cavity. The overall size of the element is 0.190 mm by 0.19 mm. The collapse voltage of the plates is measured to be approximately 3V. By driving the CMUTs with 25V pulses in the deep-collapse mode without any bias, we achieved 1.2 MPa peak-to-peak pressure output on the surface of the CMUT element with a center frequency of 9 MHz and 100% fractional bandwidth. We applied 1000 consecutive electrical pulses with alternating polarity to the element and witnessed no change in the transmitted acoustic pulse. © 2011 IEEE.Item Open Access Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers(IEEE, 2010) Senlik, M. N.; Olcum, S.; Köymen, Hayrettin; Atalar, AbdullahThe radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency for both the immersion and the airborne applications. The results are verified by finite element simulations. The work is extended to calculate the radiation impedance of an array of cMUT cells positioned in a hexagonal pattern. A higher radiation resistance improves the bandwidth as well as the efficiency of the cMUT. The radiation resistance is determined to be a strong function of the cell spacing. It is shown that a center-to-center cell spacing of 1.25 wavelengths maximizes the radiation resistance, if the membranes are not too thin. It is also found that excitation of nonsymmetric modes may reduce the radiation resistance in immersion applications.