Browsing by Author "Oguz, H. K."
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Item Open Access Erratum to "Equivalent circuit-based analysis of CMUT cell dynamics in arrays" [May 13 1016-1024](IEEE, 2013-06-03) Oguz, H. K.; Atalar, Abdullah; Köymen, HayrettinIn the original publication of the paper [1], the funding source was inadvertently omitted from the footnote on page 1016. The footnote should have read "Manuscript received November 20, 2012; accepted February 14, 2013. This work was supported by the Scientific and Technological Research Council of Turkey (TUBITAK) under project grant 110E216. A. Atalar acknowledges the support of the Turkish Academy of Sciences (TUBA)." The authors regret this omission.Item Open Access High Power CMUTs: design and experimental verification(IEEE, 2012) Yamaner, F. Y.; Olcum, S.; Oguz, H. K.; Bozkurt, A.; Köymen, Hayrettin; Atalar, AbdullahCapacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with piezoelectric transducers in high-power applications. As the output pressures increase, nonlinearity of CMUT must be reconsidered and optimization is required to reduce harmonic distortions. In this paper, we describe a design approach in which uncollapsed CMUT array elements are sized so as to operate at the maximum radiation impedance and have gap heights such that the generated electrostatic force can sustain a plate displacement with full swing at the given drive amplitude. The proposed design enables high output pressures and low harmonic distortions at the output. An equivalent circuit model of the array is used that accurately simulates the uncollapsed mode of operation. The model facilities the design of CMUT parameters for high-pressure output, without the intensive need for computationally involved FEM tools. The optimized design requires a relatively thick plate compared with a conventional CMUT plate. Thus, we used a silicon wafer as the CMUT plate. The fabrication process involves an anodic bonding process for bonding the silicon plate with the glass substrate. To eliminate the bias voltage, which may cause charging problems, the CMUT array is driven with large continuous wave signals at half of the resonant frequency. The fabricated arrays are tested in an oil tank by applying a 125-V peak 5-cycle burst sinusoidal signal at 1.44 MHz. The applied voltage is increased until the plate is about to touch the bottom electrode to get the maximum peak displacement. The observed pressure is about 1.8 MPa with −28 dBc second harmonic at the surface of the array.Item Open Access An improved lumped element nonlinear circuit model for a circular CMUT cell(IEEE, 2012) Köymen, Hayrettin; Atalar, Abdullah; Aydogdu, E.; Kocabas, C.; Oguz, H. K.; Olcum, S.; Ozgurluk, A.; Unlugedik, A.This paper describes a correction and an extension in the previously published large signal equivalent circuit model for a circular capacitive micromachined ultrasonic transducer (CMUT) cell. The force model is rederived so that the energy and power is preserved in the equivalent circuit model. The model is able to predict the entire behavior of CMUT until the membrane touches the substrate. Many intrinsic properties of the CMUT cell, such as the collapse condition, collapse voltage, the voltage-displacement interrelation and the force equilibrium before and after collapse voltage in the presence of external static force, are obtained as a direct consequence of the model. The small signal equivalent circuit for any bias condition is obtained from the large signal model. The model can be implemented in circuit simulation tools and model predictions are in excellent agreement with finite element method simulations.Item Open Access Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis(IEEE, 2010) Oguz, H. K.; Olcum, S.; Senlik, M. N.; Taş, V.; Atalar, Abdullah; Köymen, HayrettinFinite element method (FEM) is used for transient dynamic analysis of capacitive micromachined ultrasonic transducers (CMUT) and is particularly useful when the membranes are driven in the nonlinear regime. One major disadvantage of FEM is the excessive time required for simulation. Harmonic balance (HB) analysis, on the other hand, provides an accurate estimate of the steady-state response of nonlinear circuits very quickly. It is common to use Mason's equivalent circuit to model the mechanical section of CMUT. However, it is not appropriate to terminate Mason's mechanical LC section by a rigid piston's radiation impedance, especially for an immersed CMUT. We studied the membrane behavior using a transient FEM analysis and found out that for a wide range of harmonics around the series resonance, the membrane displacement can be modeled as a clamped radiator. We considered the root mean square of the velocity distribution on the membrane surface as the circuit variable rather than the average velocity. With this definition, the kinetic energy of the membrane mass is the same as that in the model. We derived the force and current equations for a clamped radiator and implemented them using a commercial HB simulator. We observed much better agreement between FEM and the proposed equivalent model, compared with the conventional model.