Browsing by Author "Khan, T. M."

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Open Access
Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: A case study for metal oxides
(American Chemical Society, 2016) Haider, A.; Deminskyi, P.; Khan, T. M.; Eren, H.; Bıyıklı, Necmi
Area-selective atomic layer deposition (AS-ALD) has attracted immense attention in recent years for self-aligned accurate pattern placement with subnanometer thickness control. Here, we demonstrate a methodology to achieve AS-ALD by using inductively couple plasma (ICP) grown fluorocarbon polymer film as hydrophobic blocking layer for selective deposition. Our approach has been tested for metal-oxide materials including ZnO, Al2O3, and HfO2. Contact angle, X-ray photoelectron spectroscopy (XPS), spectroscopic ellipsometer, and scanning electron microscopy (SEM) measurements were performed to investigate the blocking ability of plasma polymerized fluorocarbon layers against ALD-grown metal-oxide films. A considerable growth inhibition for ZnO has been observed on fluorocarbon coated Si(100) surfaces, while the same polymerized surface caused a relatively slow nucleation for HfO2 films. No growth selectivity was obtained for Al2O3 films, displaying almost the same nucleation behavior on Si and fluorocarbon surfaces. Thin film patterning has been demonstrated using this strategy by growing ZnO on lithographically patterned fluorocarbon/Si samples. High resolution SEM images and XPS line scan confirmed the successful patterning of ZnO up to a film thickness of ∼15 nm. © 2016 American Chemical Society.
Open Access
On-chip characterization of THz Schottky diodes using non-contact probes
(IEEE Computer Society, 2016) Khan, T. M.; Ghobadi, A.; Celik, O.; Caglayan, C.; Bıyıklı, Necmi; Okyay, Ali Kemal; Topalli, K.; Sertel, K.
We present non-contact characterization of GaAs Schottky contacts in the 140-220 GHz band. The non-contact probing technique utilizes planar on-chip antennas that are monolithically integrated with the coplanar waveguide environment housing the Schottky diode under test. The diode contact is fabricated through a 6 mask lithographic process with a 5 μm deep-trench under the contact to minimize parasitics and extend operation into the THz band. A quasi-optical link between the VNA ports and on-chip probe antennas enables efficient signal coupling into the test device. The non-contact probe station is calibrated using on-chip quick-offset-short method and the effectiveness of this approach is demonstrated for integrated diodes for under various bias conditions.
Open Access
Optimization of a collapsed mode CMUT receiver for maximum off-resonance sensitivity
(Institute of Electrical and Electronics Engineers, 2018-07-28) Khan, M.; Khan, T. M.; Taşdelen, A. S.; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, Hayrettin
We propose an airborne collapse capacitive micromachined ultrasonic transducer (CMUT) as a practical viable ultrasound transducer capable of providing a stable performance at the off-resonance frequencies. Traditional practice is to bias the CMUT plate close to collapse voltage to achieve high coupling coefficient and sense the incoming ultrasound as an open-circuit receive voltage signal of the transducer or short-circuit receive current (SCRC). Maintaining CMUT plate in the vicinity of collapse threshold is rather difficult. In this paper, an analytic approach to design an airborne collapsed-mode CMUT for maximum off-resonance sensitivity is presented. We use small-signal circuit model to evaluate the performance of a collapsed CMUT for varying operating conditions. CMUT operational parameters that yield the highest off-resonance SCRC are directly obtained from performance design curves. Collapsed CMUT plate is then biased in a critical biasing region that produces a stable and maximum off-resonance sensitivity. We experimentally verify and measure a stable sensitivity of a fabricated collapsed CMUT cell of -60 dB V/Pa at 100 kHz when biased between 50 to 65 V. We characterize our linear circuit model performance against the measured performance of collapsed CMUT in air within 4-dB tolerance. [2018-0058]