Browsing by Author "Elmabruk, K."
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Item Open Access Long-range ordered vertical III-nitride nano-cylinder arrays: Via plasma-assisted atomic layer deposition(Royal Society of Chemistry, 2018) Haider A.; Deminskyi, P.; Yılmaz, Mehmet; Elmabruk, K.; Yilmaz, I.; Bıyıklı, NecmiIn this work, we demonstrate vertical GaN, AlN, and InN hollow nano-cylindrical arrays (HNCs) grown on Si substrates using anodized aluminum oxide (AAO) membrane templated lowerature plasma-assisted atomic layer deposition (PA-ALD). III-Nitride HNCs have been characterized for their structural, chemical, surface, and optical properties. The material properties of nanostructured III-nitride materials have been compared with the thin-film counterparts which were also grown using PA-ALD. Our results revealed that long-range ordered arrays of III nitride HNCs were successfully integrated on Si substrates and possess hexagonal polycrystalline wurtzite crystalline structure. Such long-range ordered wafer-scale III-nitride nanostructures might be potentially used in piezotronic sensing, energy harvesting, resistive memory, flexible and wearable electronics, III-nitride photovoltaics, and (photo)catalysis.