Design charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducers

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buir.contributor.orcidAtalar, Abdullah|0000-0002-1903-1240
dc.citation.epage1944en_US
dc.citation.spage1941en_US
dc.citation.volumeNumber4en_US
dc.contributor.authorÖlçüm, Selimen_US
dc.contributor.authorŞenlik, Muhammed Niyazien_US
dc.contributor.authorBayram, Canen_US
dc.contributor.authorAtalar, Abdullahen_US
dc.coverage.spatialRotterdam, Netherlandsen_US
dc.date.accessioned2016-02-08T11:50:53Z
dc.date.available2016-02-08T11:50:53Z
dc.date.issued2005en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionDate of Conference: 18-21 September 2005en_US
dc.descriptionConference Name: Ultrasonics Symposium, IEEE 2005en_US
dc.description.abstractIn this work we define a performance measure for capacitive micromachined ultrasonic transducers (cMUT) in the form of a gain-bandwidth product to investigate the conditions that optimize the gain and bandwidth with respect to device dimensions, electrode size and electrical termination resistance. For the transmit mode, we define the figure of merit as the pressure-bandwidth product. Fully-metallized membranes achieve a higher pressure-bandwidth product compared to partially metallized ones. It is shown that the bandwidth is not affected by the electrode size in the transmit mode. In the receive mode, we define the figure of merit as the gain-bandwidth product. We show in this case that the figure of merit can be maximized by optimizing the electrode radius. We present normalized charts for designing an optimum cMUT cell at the desired frequency with a given bandwidth for transmit or receive modes. The effect of spurious capacitance and liquid loading effect are considered. Design examples are given to clarify the use of these charts.en_US
dc.identifier.doi10.1109/ULTSYM.2005.1603254en_US
dc.identifier.issn1051-0117
dc.identifier.urihttp://hdl.handle.net/11693/27336
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttp://dx.doi.org/10.1109/ULTSYM.2005.1603254en_US
dc.source.titleProceedings of the Ultrasonics Symposium, IEEE 2005en_US
dc.subjectBandwidthen_US
dc.subjectCapacitanceen_US
dc.subjectGain measurementen_US
dc.subjectMicromachiningen_US
dc.subjectNatural frequenciesen_US
dc.subjectOptimizationen_US
dc.subjectCapacitive micromachined ultrasonic transducersen_US
dc.subjectGain bandwidthen_US
dc.subjectMetallized membranesen_US
dc.subjectPressure bandwidth producten_US
dc.subjectUltrasonic transducersen_US
dc.titleDesign charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducersen_US
dc.typeConference Paperen_US
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