Planar indium tin oxide heater for improved thermal distribution for metal oxide micromachined gas sensors

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buir.contributor.authorÖzbay, Ekmel
buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828
dc.citation.epage7en_US
dc.citation.issueNumber10en_US
dc.citation.spage1en_US
dc.citation.volumeNumber16en_US
dc.contributor.authorÇakır, M. C.en_US
dc.contributor.authorÇalışkan, D.en_US
dc.contributor.authorBütün, B.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.date.accessioned2018-04-12T10:42:23Z
dc.date.available2018-04-12T10:42:23Z
dc.date.issued2016en_US
dc.departmentNanotechnology Research Center (NANOTAM)en_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.description.abstractMetal oxide gas sensors with integrated micro-hotplate structures are widely used in the industry and they are still being investigated and developed. Metal oxide gas sensors have the advantage of being sensitive to a wide range of organic and inorganic volatile compounds, although they lack selectivity. To introduce selectivity, the operating temperature of a single sensor is swept, and the measurements are fed to a discriminating algorithm. The efficiency of those data processing methods strongly depends on temperature uniformity across the active area of the sensor. To achieve this, hot plate structures with complex resistor geometries have been designed and additional heat-spreading structures have been introduced. In this work we designed and fabricated a metal oxide gas sensor integrated with a simple square planar indium tin oxide (ITO) heating element, by using conventional micromachining and thin-film deposition techniques. Power consumption-dependent surface temperature measurements were performed. A 420 °C working temperature was achieved at 120 mW power consumption. Temperature distribution uniformity was measured and a 17 °C difference between the hottest and the coldest points of the sensor at an operating temperature of 290 °C was achieved. Transient heat-up and cool-down cycle durations are measured as 40 ms and 20 ms, respectively. © 2016 by the authors; licensee MDPI, Basel, Switzerland.en_US
dc.identifier.doi10.3390/s16101612en_US
dc.identifier.issn1424-8220
dc.identifier.urihttp://hdl.handle.net/11693/36498
dc.language.isoEnglishen_US
dc.publisherMDPI AGen_US
dc.relation.isversionofhttp://dx.doi.org/10.3390/s16101612en_US
dc.source.titleSensors (Switzerland)en_US
dc.subjectHeat distributionen_US
dc.subjectIndium tin oxideen_US
dc.subjectMetal oxide gas sensoren_US
dc.subjectMicro hot-plateen_US
dc.subjectSnO2en_US
dc.titlePlanar indium tin oxide heater for improved thermal distribution for metal oxide micromachined gas sensorsen_US
dc.typeArticleen_US
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