Design and realization of a fully on-chip High-Q resonator at 15 GHz on silicon

Date
2008-12
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Source Title
IEEE Transactions on Electron Devices
Print ISSN
0018-9383
Electronic ISSN
1557-9646
Publisher
Institute of Electrical and Electronics Engineers
Volume
55
Issue
12
Pages
3459 - 3466
Language
English
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Abstract

We develop and demonstrate an on-chip resonator working at 15 GHz with a high quality factor (Q-factor) of 93.81 while only requiring a small chip size of 195 mu m x 195 mu m on Si by using our new design methodology. In our design, unlike previous approaches, we avoid the need for any external capacitance for tuning; instead, we utilize the film capacitance as the capacitor of the LC tank circuit and realize a fully on-chip resonator that shows a strong transmission dip of > 30 dB on resonance as required for telemetric-sensing applications. We present the design, theory, methodology, microfabrication, experimental characterization, and theoretical analysis of these resonators. We also demonstrate that the experimental results are in excellent agreement with the theoretical (both analytical and numerical) results. Based on our proof-of-concept demonstration, such high-Q on-chip resonators hold great promise for use in transmissive telemetric sensors.

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