Measurement and characterization of nano-electro-mechanical systems using laser interferometry

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buir.contributor.authorHanay, M. Selim
dc.contributor.authorBello, V.
dc.contributor.authorAri, A. B.
dc.contributor.authorHanay, M. Selim
dc.contributor.authorEkinci, K. L.
dc.coverage.spatialDubrovnik, Croatia, Croatiaen_US
dc.date.accessioned2021-01-28T11:46:57Z
dc.date.available2021-01-28T11:46:57Z
dc.date.issued2020
dc.departmentDepartment of Mechanical Engineeringen_US
dc.descriptionDate of Conference: 25-28 May 2020en_US
dc.descriptionConference name: 2020 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2020en_US
dc.description.abstractIn this work, we describe a method to measure and characterize the mechanical properties of nano-electromechanical systems (NEMS) based on laser interferometry. The resonant mechanical modes of doubly-clamped nanomechanical beam resonators were first characterized using their thermal fluctuations in air. Afterwards, the NEMS devices were electrothermally actuated, and their frequency responses were measured, also in air. The main novelty in this work is the simultaneous use of two electro-thermal actuators integrated on opposite ends of the NEMS, which could selectively actuate higher order modes based on the relative phase difference (of 0°, 45° or 90°) applied between the two actuators. All the measurements were carried out in a homodyne Michelson interferometer, allowing for ultrasensitive non-contact, noninvasive, remote, and non-destructive analysis.en_US
dc.identifier.doi10.1109/I2MTC43012.2020.9129282en_US
dc.identifier.isbn9781728144603
dc.identifier.urihttp://hdl.handle.net/11693/54952
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://dx.doi.org/10.1109/I2MTC43012.2020.9129282en_US
dc.source.titleI2MTC 2020 - International Instrumentation and Measurement Technology Conference, Proceedingsen_US
dc.subjectNano-electro-mechanical systemsen_US
dc.subjectOptical measurementsen_US
dc.subjectLaser interferometryen_US
dc.subjectMechanical resonancesen_US
dc.subjectThermal noiseen_US
dc.subjectElectro-thermal actuationen_US
dc.titleMeasurement and characterization of nano-electro-mechanical systems using laser interferometryen_US
dc.typeConference Paperen_US
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