Analog integrated circuit of a low level high voltage current source with capacitive load compensation

buir.advisorAtalar, Abdullah
dc.contributor.authorÖner, Mustafa Ertuğrul
dc.date.accessioned2016-01-08T20:14:31Z
dc.date.available2016-01-08T20:14:31Z
dc.date.copyright1997
dc.date.issued1997
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.descriptionAnkara : Department of Electrical and Electronics Engineering and the Institute of Engineering and Sciences of Bilkent University, 1997.en_US
dc.descriptionThesis (Master's) -- Bilkent University, 1997.en_US
dc.descriptionIncludes bibliographical references (leaves 77-79).en_US
dc.descriptionCataloged from PDF version of article.
dc.description.abstractAtomic Force Microscopes (AFM) are used to sense the deflections on crystalline surfaces and convert the information gathered to an image of surface map. In a newly proposed interferometric sensor, cantilevers are micromachined into the shape of interdigitated fingers to form a diffraction grating and the tip displacement is determined by measuring the intensity of diffracted modes. Detection of modes is achieved by means of a photodetector (PD) array mounted just above the cantilevers. For this purpose, a PD array of 2x8 composed of MSM-PDs is designed and manufactured. A (p superscript plus)/n PD is also designed for testing. In addition, a high voltage low level current source is required to drive the tips of the cantilevers for the purpose of lithography. The current source designed for this purpose can supply 10nA current through the resistive cantilever in spite of an existing capacitance at load. Current source includes an internal capacitive current compensation circuit to fix the current of resistive load at 10nA. Test of design circuit is done and prototypes of chip are fabricated using Alcatel Mietec 12T CMOS process. PSD array and current source are supposed to be prototypes of the related blocks in AFM.
dc.description.degreeM.S.en_US
dc.description.statementofresponsibilityby Mustafa Ertuğrul Öneren_US
dc.format.extentxiv, 94 leaves : illustrations ; 30 cm.en_US
dc.identifier.itemidBILKUTUPB040263
dc.identifier.urihttp://hdl.handle.net/11693/17909
dc.language.isoEnglishen_US
dc.publisherBilkent Universityen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.titleAnalog integrated circuit of a low level high voltage current source with capacitive load compensationen_US
dc.title.alternativeYükteki kordansatör akımını telafi edebilen düşük seviye yüksek gerilim akım kaynağı tasarımı
dc.typeThesisen_US
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