Design of a high-resolution microfluidic microwave MEMS phase shifter

Date
2011
Authors
Ozbey, B.
Ozturk, S.
Aktas, O.
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Source Title
Microwave and Optical Technology Letters
Print ISSN
0895-2477
Electronic ISSN
Publisher
Wiley
Volume
53
Issue
8
Pages
1902 - 1905
Language
English
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Abstract

In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time.

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