Predictive antiwindup compensation for repetitive control supporting nanoscanning

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buir.contributor.authorÖzbay, Hitay
buir.contributor.orcidÖzbay, Hitay|0000-0003-1134-0679
dc.citation.epage1814en_US
dc.citation.issueNumber4en_US
dc.citation.spage1807en_US
dc.citation.volumeNumber29en_US
dc.contributor.authorYan, P.
dc.contributor.authorLiu, P.
dc.contributor.authorÖzbay, Hitay
dc.date.accessioned2022-01-28T11:14:22Z
dc.date.available2022-01-28T11:14:22Z
dc.date.issued2021
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.description.abstractUltrahigh precision scanning has emerged as a promising and challenging technology in nanoscale measurement and manipulation. Besides the requirement of dynamical tracking of periodical references, the existence of control saturation, due to the limited stroke of microactuators, poses additional challenges for the control of such systems. To address this problem, we propose a repetitive control structure with predictive antiwindup compensation to support nanoscale repetitive tracking/scanning with a minimized impact of actuator saturation. In particular, the proposed antiwindup compensator is activated by the time-lead control output ahead of saturation due to the time-delay block in the repetitive control structure. According to the input/output (I/O)-based equivalent representation and sector bound criterion, stability conditions for the antiwindup compensator are derived, which are further formulated as an H ∞ optimization problem with the robustness against model uncertainties, where the optimal compensator is developed. The effectiveness of the proposed tracking control architecture is further verified in real-time experiments on a piezoelectric-actuator-driven nanostage, where significant improvements are demonstrated comparing with the existing results.en_US
dc.identifier.doi10.1109/TCST.2020.3010952en_US
dc.identifier.eissn1558-0865
dc.identifier.issn1063-6536
dc.identifier.urihttp://hdl.handle.net/11693/76870
dc.language.isoEnglishen_US
dc.publisherIEEEen_US
dc.relation.isversionofhttps://doi.org/10.1109/TCST.2020.3010952en_US
dc.source.titleIEEE Transactions on Control Systems Technologyen_US
dc.subjectAntiwindup controlen_US
dc.subjectH∞ optimizationen_US
dc.subjectNanotrackingen_US
dc.subjectRepetitive controlen_US
dc.subjectTime delayen_US
dc.titlePredictive antiwindup compensation for repetitive control supporting nanoscanningen_US
dc.typeArticleen_US
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