Ultrafast micromachining of Cu and Si at ultra-high repetition rates with pulse bursts

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Ultrafast micromachining of Cu and Si at ultra-high repetition rates with pulse bursts.pdf (518.82 KB)
Date
2016
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2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)
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IEEE
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English
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Conference Paper
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Abstract

We report a novel ultrafast burst mode fiber laser system, which can deliver pulses at ultra-high repetition rates in order to systematically investigate micromachining efficiency on copper and silicon samples. © 2015 IEEE.

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Composite micromechanics , Fiber lasers , Micromachining , Burst mode , Laser systems , Silicon samples , Ultra-fast , Ultra-high , Pulse repetition rate
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http://hdl.handle.net/11693/37754
Published Version (Please cite this version)
http://dx.doi.org/10.1109/CLEOPR.2015.7376419
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Department of Electrical and Electronics Engineering
Institute of Materials Science and Nanotechnology (UNAM)