Vibration signals are widely used for different monitoring purposes in numerous areas of applications. Sensing vibration and examining its properties play a critically important role essential to damage monitoring especially in the fields of construction and machinery. Detection of possible damages to these structures/machines requires cost-effective and easy-to-use solutions both to protect human health and/or reduce the cost of potential damage to the structures/machines. In this thesis, to offer an efficient and reliable solution for monitoring the health and integrity of various structures and machinery, we proposed and developed a new class of meta-structure based vibration probes that offer high-resolution and real-time wireless monitoring capabilities in vibration sensing. Operating in the radio frequency (RF) domain, this sensor concept relies on the near-field coupling of two nested split ring resonators (NSRRs), each of which is free to move toward each other. In response to the mechanical vibration occurring on a surface to which one of the NSRRs is attached, the amplitude of the electromagnetic wave read out only in vertical direction with respect to the NSRR probe from the coupled-NSRR pair by a transceiver antenna monotonously changes, making the sensing system capable of detecting mechanical vibrations over a wide RF range. The most important advantage of the proposed sensing architecture is that the resonant frequency read-out is very strongly dependent on the spacing between the coupled-NSRR probes, which makes wireless vibration detection at low amplitudes possible. The experimental findings show that this system can wirelessly measure vibration amplitudes as low as 50 µm. Equally important, this opportunely enables a high level of vibration resolution of (differentiation of two close vibration amplitudes separated by) 38.4 µm with an average error rate of only 1.2%. The sensing system exhibits a sensitivity level of 866 kHz/mm. The wireless and passive nature of the proposed system, together with the cost-effectiveness of our NSRR probes, make it highly promising for real-life applications including remote structural health monitoring, deformation detection, and vibration wave monitoring.