Microfabrication of micro Hall sensors on GaAs and INSB for scanning hall probe microscopy

Date
2001
Editor(s)
Advisor
Oral, Ahmet
Supervisor
Co-Advisor
Co-Supervisor
Instructor
Source Title
Print ISSN
Electronic ISSN
Publisher
Bilkent University
Volume
Issue
Pages
Language
English
Journal Title
Journal ISSN
Volume Title
Series
Abstract

Different techniques have been developed to investigate the surface magnetic structure of materials, including Hall probe, scanning superconductivity quantum interference device (SQUID) and magnetic force microscopies (MFMs), Bitter decoration, Faraday rotation, and electron holography. Recently, the scanning Hall probe microscope (SHPM) has been shown to be a very sensitive, noninvasive instrument with which to obtain quantitative measurements of surface magnetic field profiles with high spatial resolution ( 120 nm)under variable temperature and magnetic field operation. In this thesis we are going to present microfabrication of Hall probes of < 1 micron on GaAs/AlGaAs 2DEG and InSb material to be used for Scanning Hall Probe Microscopy (SHPM) for magnetic imaging at sub-micron scale. First images obtained by InSb Hall probes will be presented

Course
Other identifiers
Book Title
Keywords
Citation
Published Version (Please cite this version)